The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8686497 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 01, 2014

Filed:

Mar. 06, 2012
Applicants:

Wookhyun Kwon, Albany, CA (US);

Tsu-jae King Liu, Fremont, CA (US);

Inventors:

WookHyun Kwon, Albany, CA (US);

Tsu-Jae King Liu, Fremont, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

A double-gate vertical channel transistor (DGVC) structure is described which is particularly well suited for Dynamic RAM (DRAM) memory (e.g., capacitorless DRAM) wherein the memory cell occupies a small cell area of 4F, and provides beneficial retention properties including immunity to disturbances. The vertical transistors are arranged in an alternating gate-facing orientation, with a common source formed on a first end and separate drains on their second ends. Word lines comprise alternating front gates and back gates shared by columns of gate-facing transistors on each side of it. The DGVC cell provides enhanced scalability allowing the continued scaling of DRAM technology and can be fabricated using low-cost semiconductor materials and existing fabrication techniques. Fabrication techniques and array biasing are also described for the DGVC cell arrays.


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