The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2014
Filed:
Mar. 27, 2012
Jun Nishimura, Kuwana, JP;
Jun Nishimura, Kuwana, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A semiconductor memory device includes a cell array layer having a memory cell. The memory cell has a current control device, a variable resistance device and a metal layer for silicide. A method for manufacturing the semiconductor memory device includes: forming the metal layer for silicide on a semiconductor layer for forming the current control device and a variable resistance device layer; selectively removing the variable resistance device layer and the metal layer through first etching; forming a first protective layer to cover at least a side surface of the metal layer exposed by the first etching; selectively removing a part of the semiconductor layer, through second etching; and forming a second protective layer to cover the variable resistance device layer, the metal layer for silicide, and the semiconductor layer.