The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2014
Filed:
Jun. 10, 2009
Applicants:
Kenneth E. Gonsalves, Concord, NC (US);
Mingxing Wang, Matthews, NC (US);
Inventors:
Kenneth E. Gonsalves, Concord, NC (US);
Mingxing Wang, Matthews, NC (US);
Assignee:
University Of North Carolina At Charlotte, Charlotte, NC (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 303/38 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); G03F 7/039 (2013.01); C07C 303/38 (2013.01); Y10S 430/106 (2013.01); Y10S 430/12 (2013.01); Y10S 430/122 (2013.01); Y10S 430/123 (2013.01);
Abstract
The present invention provides photoacid generators for use in chemically amplified resists and lithographic processes using the same.