The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Jan. 13, 2011
Yasuyuki Yamada, Kanagawa, JP;
Yasuyuki Yamada, Kanagawa, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to the embodiments, a plurality of positional relationships between a coordinate system for indicating a defect position on a wafer that is used by an inspection device and a coordinate system that is used in design data on a pattern is set, the defect position output by the inspection device and the design data are aligned by using each of the set positional relationships, and a local pattern of a portion in which the defect position is aligned is extracted from the design data for each positional relationship. Then, the extracted local pattern is classified based on a degree of matching of graphical feature. The number of classification patterns is calculated for each positional relationship. Then, a pattern dependence degree of the detected defect group is calculated by using the calculated number of classification patterns of each positional relationship.