The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Jun. 23, 2011
Michael E. Hoenk, Valencia, CA (US);
Frank Greer, Pasadena, CA (US);
Shouleh Nikzad, Valencia, CA (US);
Michael E. Hoenk, Valencia, CA (US);
Frank Greer, Pasadena, CA (US);
Shouleh Nikzad, Valencia, CA (US);
California Institute of Technology, Pasadena, CA (US);
Abstract
A back-illuminated silicon photodetector has a layer of AlOdeposited on a silicon oxide surface that receives electromagnetic radiation to be detected. The AlOlayer has an antireflection coating deposited thereon. The AlOlayer provides a chemically resistant separation layer between the silicon oxide surface and the antireflection coating. The AlOlayer is thin enough that it is optically innocuous. Under deep ultraviolet radiation, the silicon oxide layer and the antireflection coating do not interact chemically. In one embodiment, the silicon photodetector has a delta-doped layer near (within a few nanometers of) the silicon oxide surface. The AlOlayer is expected to provide similar protection for doped layers fabricated using other methods, such as MBE, ion implantation and CVD deposition.