The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
May. 26, 2005
Manufacturing resistors with tightened resistivity distribution in semiconductor integrated circuits
Applicants:
Thanas Budri, Portland, ME (US);
Jerald M. Rock, Windham, ME (US);
Randy Supczak, South Portland, ME (US);
Inventors:
Thanas Budri, Portland, ME (US);
Jerald M. Rock, Windham, ME (US);
Randy Supczak, South Portland, ME (US);
Assignee:
National Semiconductor Corporation, Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
An anneal recipe is provided to tighten the distribution of resistance values in the manufacture of semiconductor integrated circuits. An adjusted amount of dopant is implanted to compensate for a shift in the distribution of resistance values associated with the anneal recipe. The distribution tightening can be effectuated by including an ammonia gas flow in the anneal recipe.