The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Nov. 23, 2011
Applicants:
Mongsup Lee, Seoul, KR;
Inseak Hwang, Suwon-si, KR;
Byoung-yong Gwak, Suwon-si, KR;
Sukhun Choi, Suwon-si, KR;
Sang-jun Lee, Seoul, KR;
Inventors:
Mongsup Lee, Seoul, KR;
Inseak Hwang, Suwon-si, KR;
Byoung-Yong Gwak, Suwon-si, KR;
Sukhun Choi, Suwon-si, KR;
Sang-Jun Lee, Seoul, KR;
Assignee:
Samsung Electronics Co., Ltd., Yeongtong-gu, Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present disclosure describes methods of fabricating a semiconductor device. An exemplary method includes forming a metal pattern on a substrate and etching the metal pattern using an etchant including at least an alkaline solution and an oxidant to form a metal electrode, where at least a portion of the surface of the metal electrode is uneven.