The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Aug. 01, 2003
Paul E. Fischione, Export, PA (US);
Alan C. Robins, Horley Surrey, GB;
David W. Smith, Oakmont, PA (US);
Rocco R. Cerchiara, Gibsonia, PA (US);
Joseph M. Matesa, Jr., Murrysville, PA (US);
Paul E. Fischione, Export, PA (US);
Alan C. Robins, Horley Surrey, GB;
David W. Smith, Oakmont, PA (US);
Rocco R. Cerchiara, Gibsonia, PA (US);
Joseph M. Matesa, Jr., Murrysville, PA (US);
E.A. Fischione Instruments, Inc., Export, PA (US);
Abstract
An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.