The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Oct. 07, 2011
Setsuo Yoshida, Saitama, JP;
Noriyasu Hasegawa, Utsunomiya, JP;
Yoshihiro Shiode, Utsunomiya, JP;
Tatsuya Hayashi, Utsunomiya, JP;
Setsuo Yoshida, Saitama, JP;
Noriyasu Hasegawa, Utsunomiya, JP;
Yoshihiro Shiode, Utsunomiya, JP;
Tatsuya Hayashi, Utsunomiya, JP;
Canon Kabushiki Kaisha, , JP;
Abstract
The imprint apparatus of the present invention molds an imprint material on a substrate using a mold and cures the imprint material to form a pattern on the substrate. The apparatus includes a holder configured to attract the mold to hold the mold; and a pressure reduction device configured to reduce a back pressure of the mold held by the holder, wherein the apparatus is configured to reduce the back pressure by the pressure reduction device in parallel with release of the mold from the imprint material.