The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Oct. 04, 2010
Gerald M. Friedman, New Ipswich, NH (US);
Michael L. Bufano, Belmont, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
Ulysses Gilchrist, Reading, MA (US);
William Fosnight, Carlisle, MA (US);
Gerald M. Friedman, New Ipswich, NH (US);
Michael L. Bufano, Belmont, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
Ulysses Gilchrist, Reading, MA (US);
William Fosnight, Carlisle, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.