The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Feb. 16, 2010
Shunsuke Kido, Kusatsu, JP;
Takeshi Nakao, Omihachiman, JP;
Yasuharu Nakai, Takatsuki, JP;
Kenji Nishiyama, Yasu, JP;
Michio Kadota, Kyoto, JP;
Shunsuke Kido, Kusatsu, JP;
Takeshi Nakao, Omihachiman, JP;
Yasuharu Nakai, Takatsuki, JP;
Kenji Nishiyama, Yasu, JP;
Michio Kadota, Kyoto, JP;
Murata Manufacturing Co., Ltd., Kyoto, JP;
Abstract
A method for fabricating an acoustic wave device includes the steps of forming an insulating material layer on a piezoelectric substrate, forming a patterned photoresist on the insulating material layer, patterning the insulating material layer, and forming a piezoelectric-substrate exposed depression corresponding to a region where an interdigital transducer electrode is to be formed on a first insulator layer composed of the insulating material layer, depositing a metallic material on the piezoelectric substrate to form the interdigital transducer electrode in the piezoelectric-substrate exposed depression such that the overall interdigital transducer electrode is thinner than the first insulator layer and coating the photoresist with a metallic material, removing the photoresist and the metallic material on the photoresist, and depositing a second insulator layer so as to cover the interdigital transducer electrode and the first insulator layer.