The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Nov. 18, 2011
Takashi Nishikawa, Tokyo, JP;
Takashi Nishikawa, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A shape measuring device comprises a high speed image processor for extracting one target image and at least one reference image other than the target image from among the plurality of images, and for causing a digital operator to act on the target image and the reference image to calculate local degrees of focusing for each extracted pair of the target image and the reference image on a pixel by pixel basis for the target image; and a control computer for finding the surface height of the measurement object on the basis of the maximum relative movement position of each pixel from among a plurality of the local degrees of focusing calculated on a pixel by pixel basis.