The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 18, 2014

Filed:

Jul. 20, 2010
Applicants:

Taiji Ema, Kawasaki, JP;

Tohru Anezaki, Kawasaki, JP;

Inventors:

Taiji Ema, Kawasaki, JP;

Tohru Anezaki, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 29/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The semiconductor device includes a first conductor formed over a semiconductor substrate; a first insulator formed over the first conductor; a second insulator formed over the first insulator, the second insulator having an etching characteristic different from an etching characteristic of the first insulator; a second conductor formed on the second insulator, the second conductor being in contact with the second insulator; a third insulator formed over the second conductor, the third insulator having an etching characteristic different from the etching characteristic of the second insulator; a first contact hole formed through the third insulator and the second conductor, the first contact hole reaching the second insulator; a third conductor formed in the first contact hole, wherein a side wall of the third conductor is electrically connected to a side wall of the second conductor; a second contact hole formed through the third insulator and the first insulator, the second contact hole reaching the first conductor; and a fourth conductor formed in the second contact hole, wherein the fourth conductor is electrically connected to the first conductor.


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