The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Feb. 04, 2008
Peter Van Der Meulen, Newburyport, MA (US);
Christopher C Kiley, Carlisle, MA (US);
Patrick D. Pannese, Lynnfield, MA (US);
Raymond S. Ritter, Boxborough, MA (US);
Thomas A. Schaefer, Groveland, MA (US);
Peter van der Meulen, Newburyport, MA (US);
Christopher C Kiley, Carlisle, MA (US);
Patrick D. Pannese, Lynnfield, MA (US);
Raymond S. Ritter, Boxborough, MA (US);
Thomas A. Schaefer, Groveland, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.