The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 11, 2014

Filed:

Apr. 09, 2012
Applicants:

Roy H. Olsson, Albuquerque, NM (US);

Kenneth Wojciechowski, Albuquerque, NM (US);

Bongsang Kim, Albuquerque, NM (US);

Inventors:

Roy H. Olsson, Albuquerque, NM (US);

Kenneth Wojciechowski, Albuquerque, NM (US);

Bongsang Kim, Albuquerque, NM (US);

Assignee:

Sandia Corporation, Albuquerque, NM (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03B 5/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.


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