The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2014
Filed:
Mar. 30, 2011
Jeffrey Squier, Golden, CO (US);
Dawn Vitek, Lakewood, CO (US);
Charles Durfee, Golden, CO (US);
Daniel Adams, Golden, CO (US);
David Kleinfeld, San Diego, CA (US);
Jeffrey Squier, Golden, CO (US);
Dawn Vitek, Lakewood, CO (US);
Charles Durfee, Golden, CO (US);
Daniel Adams, Golden, CO (US);
David Kleinfeld, San Diego, CA (US);
Colorado School of Mines, Golden, CO (US);
Abstract
Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (˜1 mm) features with parallel sidewalls are ablated at high material removal rates.