The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2014
Filed:
Oct. 21, 2010
Martin Dimer, Dresden, DE;
Tina Schoessler, Dresden, DE;
Thomas Knoth, Dresden, DE;
Ralf Sturm, Dresden, DE;
Uwe Graupner, Dresden, DE;
Martin Thumsch, Dresden, DE;
Hans-christian Hecht, Weinböhla, DE;
Martin Dimer, Dresden, DE;
Tina Schoessler, Dresden, DE;
Thomas Knoth, Dresden, DE;
Ralf Sturm, Dresden, DE;
Uwe Graupner, Dresden, DE;
Martin Thumsch, Dresden, DE;
Hans-Christian Hecht, Weinböhla, DE;
VON ARDENNE Anlagentechnik GmbH, Dresden, DE;
Abstract
A method is provided for depositing a transparent conductive oxide (TCO) layer on a substrate, in which contaminations of the layers of the layer system is reduced through the diffusion of material from the substrate, and whose layer properties in respect to coupling and transmission of light are optimized. For that purpose, a barrier layer, a seed layer and a transparent conductive oxide layer are directly successively deposited on the substrate. Also, a thin-film solar cell is described which comprises such a transparent conductive oxide layer.