The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Mar. 02, 2010
Yi He, Winchester, MA (US);
Luzhong Yin, Woburn, MA (US);
Guixiong Zhong, Billerica, MA (US);
Jun Yan, Reading, MA (US);
Jing Zhao, Winchester, MA (US);
Yi He, Winchester, MA (US);
Luzhong Yin, Woburn, MA (US);
Guixiong Zhong, Billerica, MA (US);
Jun Yan, Reading, MA (US);
Jing Zhao, Winchester, MA (US);
Agiltron, Inc., Woburn, MA (US);
Abstract
A MEMS variable optical attenuator (VOA) chip includes a frame having a planar surface, a micro-electric actuator with a movable optical shutter arranged with respect to the planar surface of the frame, where the VOA is actuated by thermal expansion. The micro-electric actuator comprises semiconductor conductors ('wires') that can be moved, upon applying an electrical current, by thermal expansion. In one embodiment, the MEMS VOA chip is configured in a multiple wire arrangement that restricts the shutter movement in a plane.