The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Sep. 17, 2010
Jan H. Kuypers, Cambridge, MA (US);
David M. Chen, Brookline, MA (US);
Alexei Gaidarzhy, Brighton, MA (US);
Guiti Zolfagharkhani, Brighton, MA (US);
Jan H. Kuypers, Cambridge, MA (US);
David M. Chen, Brookline, MA (US);
Alexei Gaidarzhy, Brighton, MA (US);
Guiti Zolfagharkhani, Brighton, MA (US);
Sand 9, Inc., Cambridge, MA (US);
Abstract
Passivated micromechanical resonators and related methods are described. Applicants have appreciated that polycrystalline conductive layers used as electrodes for some MEMS resonators are a source of mechanical and electrical instability. To inhibit or prevent contamination of such conductive layers, which may exacerbate the instabilities, passivation structures are used. The passivation structures can be grown, deposited, or otherwise formed.