The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Feb. 14, 2011
Charles W. Blackmer, Ithaca, NY (US);
Scott G. Adams, Ithaca, NY (US);
Andrew S. Hocking, Ithaca, NY (US);
Kristin J. Lynch, Ithaca, NY (US);
Ashish A. Shah, Ithaca, NY (US);
Charles W. Blackmer, Ithaca, NY (US);
Scott G. Adams, Ithaca, NY (US);
Andrew S. Hocking, Ithaca, NY (US);
Kristin J. Lynch, Ithaca, NY (US);
Ashish A. Shah, Ithaca, NY (US);
Kionix, Inc., Ithaca, NY (US);
Abstract
In an embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam, and can have a non-linear shape. In another embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam. The isolation joint can have a first portion, a second portion, and a bridge portion between the first portion and the second portion. The first and second portions of the isolation joint can each have a seam and a void, while the bridge portion can be solid.