The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Feb. 07, 2012
Applicants:
Yuichi Hamada, Annaka, JP;
Tatsuya Sema, Annaka, JP;
Inventors:
Yuichi Hamada, Annaka, JP;
Tatsuya Sema, Annaka, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/14 (2006.01); G03F 1/00 (2012.01); G03F 1/62 (2012.01);
U.S. Cl.
CPC ...
Abstract
There is provided a pellicle kit for manufacturing a pellicle which comprises a pellicle frame having a jig hole in the outer wall of its frame bar and a jig having a jig pin which is adjusted to enter the respective jig hole until the front end of the jig pin is abutted against the tapered bottom face of the jig hole to thereby fix said pellicle frame.