The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Sep. 24, 2012
Brooks Automation, Inc., Chelmsford, MA (US);
Christopher Hofmeister, Holderness, NH (US);
Martin R. Elliot, Pepperell, MA (US);
Alexander Krupyshev, Chelmsford, MA (US);
Joseph Hallisey, Pepperell, MA (US);
Joseph A. Kraus, Pepperell, MA (US);
William Fosnight, Saratoga Springs, NY (US);
Craig J. Carbone, Lunenburg, MA (US);
Jeffrey C. Blahnik, Pepperell, MA (US);
Ho Yin Owen Fong, Santa Clara, CA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.