The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2014
Filed:
Mar. 24, 2010
Keon Jae Lee, Daejeon, KR;
Suk Joong L. Kang, Daejeon, KR;
Jaemyung Chang, Daejeon, KR;
Kwi-il Park, Daejeon, KR;
Seungjun Kim, Daejeon, KR;
Sang Yong Lee, Gwangju, KR;
Keon Jae Lee, Daejeon, KR;
Suk Joong L. Kang, Daejeon, KR;
Jaemyung Chang, Daejeon, KR;
Kwi-il Park, Daejeon, KR;
Seungjun Kim, Daejeon, KR;
Sang Yong Lee, Gwangju, KR;
Abstract
A method of manufacturing a flexible piezoelectric device including laminating a first metal layer on a silicon oxide layer on a silicon substrate. The method further includes laminating a device on the first metal layer and annealing the first metal layer to oxidize the first metal into a first metal oxide. The method further includes etching the first metal oxide to separate the device from the silicon oxide layer and transferring the separated device to a flexible substrate using a transfer layer. The metal oxide layer laminated on the silicon substrate is etched to separate the device from the substrate. As a result, physical damage of the silicon substrate is prevented and a cost of using expensive single-crystal silicon substrate is reduced.