The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2014
Filed:
Jul. 23, 2009
Applicants:
Ulli Hansen, Berlin, DE;
Jürgen Leib, Neunkirchen am Brand, DE;
Simon Maus, Berlin, DE;
Inventors:
Assignee:
MSG Lithoglas AG, Berlin, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/05 (2006.01);
U.S. Cl.
CPC ...
H03G 9/059 (2013.01);
Abstract
The invention relates to a method for producing a dielectric layer () in an electroacoustic component (), in particular a component operating with acoustic surface waves or bulk acoustic waves, comprising a substrate and an associated electrode structure, in which the dielectric layer () is formed at least in part by depositing by a thermal vapor deposition process at least one evaporation material selected from the following group of layer vaporising materials: vapor deposition glass material such as borosilicate glass, silicon nitride and aluminum oxide. The invention further relates to an electroacoustic component.