The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2014
Filed:
Jun. 25, 2009
Applicants:
Franz Schrank, Graz, AT;
Günther Koppitsch, Lieboch, AT;
Michael Beutl, Graz, AT;
Sara Carniello, Graz, AT;
Jochen Kraft, Oberaich, AT;
Inventors:
Franz Schrank, Graz, AT;
Günther Koppitsch, Lieboch, AT;
Michael Beutl, Graz, AT;
Sara Carniello, Graz, AT;
Jochen Kraft, Oberaich, AT;
Assignee:
AMS AG, Unterpremstaetten, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
In an insulation layer of an SOI substrate, a connection pad is arranged. A contact hole opening above the connection pad is provided on side walls and on the connection pad with a metallization that is contacted on top side with a top metal.