The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2014
Filed:
Nov. 09, 2011
Applicants:
MI Hee Jung, Daejeon, KR;
Man Gu Kang, Daejeon, KR;
Inventors:
Mi Hee Jung, Daejeon, KR;
Man Gu Kang, Daejeon, KR;
Assignee:
Electronics and Telecommunications Research Institute, Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Provided is a method of forming a method of forming a titanium dioxide (TiO) array using a zinc oxide (ZnO) template. In the method, polymer nanopatterns are formed on the substrate, and monomolecular monolayers are formed between the polymer nanopatterns on the substrate. A seed layer pattern is formed between the monomolecular monolayers on the substrate, and a zinc oxide template is formed by growing zinc oxide on the seed layer.