The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2014
Filed:
Mar. 03, 2011
Kanjun Yamamoto, Ishikawa-Ken, JP;
Kanjun Yamamoto, Ishikawa-Ken, JP;
Shibuya Kogyo Co., Ltd., Kanazawa-shi, Ishikawa-ken, JP;
Abstract
A gas supply passage is connected to a decontamination liquid supply passage at a tail end portion side from a delivery device, and an on-off valve which opens and closes the gas supply passage is provided. A controller stores a housed weight of the decontamination liquid between a connection point at which the above described gas supply passage is connected to the decontamination liquid supply passage and the above described tail end portion. When a weight of the decontamination liquid is reduced by a total value of a predetermined weight W which should be supplied to the downstream side equipment and the above described housed weight as a result of starting supply of the decontamination liquid to the above described downstream side equipment, the controller opens the above described on-off valve to return the decontamination liquid at the upstream side from the connection point.