The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Mar. 24, 2011
Bungo Shigeta, Kanagawa, JP;
Ippei Takahashi, Kanagawa, JP;
Bungo Shigeta, Kanagawa, JP;
Ippei Takahashi, Kanagawa, JP;
Fujifilm Corporation, Tokyo, JP;
Abstract
A surface inspection apparatus includes a light source for applying a detection laser beam to a film sample. A light receiver has plural photomultiplier tubes arranged in a width direction of the film sample, for receiving output light reflected by the film sample. A defect detector detects a defect on the film sample according to an output signal output by each of the photomultiplier tubes. A sensitivity corrector sets sensitivity of the photomultiplier tubes to process an output of the light receiver for output noise suppression. Specifically, the sensitivity corrector determines a set sensitivity of the photomultiplier tubes by correcting a sensitivity characteristic thereof for abnormality detection, to keep a sensitivity difference between the photomultiplier tubes as small as a predetermined value or less. Furthermore, plural light valves upstream from the light receivers are controlled by the sensitivity corrector for their transmittance.