The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Mar. 04, 2008
Motoaki Hara, Tokyo, JP;
Tokihiro Nishihara, Tokyo, JP;
Shinji Taniguchi, Tokyo, JP;
Takeshi Sakashita, Tokyo, JP;
Tsuyoshi Yokoyama, Tokyo, JP;
Masafumi Iwaki, Tokyo, JP;
Masanori Ueda, Tokyo, JP;
Motoaki Hara, Tokyo, JP;
Tokihiro Nishihara, Tokyo, JP;
Shinji Taniguchi, Tokyo, JP;
Takeshi Sakashita, Tokyo, JP;
Tsuyoshi Yokoyama, Tokyo, JP;
Masafumi Iwaki, Tokyo, JP;
Masanori Ueda, Tokyo, JP;
Taiyo Yuden Co., Ltd., Tokyo, JP;
Abstract
A piezoelectric thin film resonator of the present has a substrate, an intermediate layerdisposed on the substrateand is formed of an insulator, a lower electrodedisposed on the intermediate layer, a piezoelectric filmdisposed on the lower electrode, and an upper electrodedisposed on a position facing the lower electrodewith the piezoelectric filminterposed therebetween, in which, in a resonant regionwhere the lower electrodeand the upper electrodeface each other, a spaceis formed in the substrateand the intermediate layeror between the lower electrodeand the intermediate layerand the region of the spaceis included in the resonant region. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.