The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Dec. 11, 2012
Applicant:
Arizona Board of Regents, a Body Corporate for the State of Arizona Acting for and on Behalf of Arizona, Scottsdale, AZ (US);
Inventors:
Jemmy Sutanto, Scottsdale, AZ (US);
Jitendran Muthuswamy, Chandler, AZ (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Systems and methods of the present disclosure provide for three-dimensional stacks of microelectromechanical (MEMS) systems, such as sensors. The stacks may be encapsulated and sealed, and can be positioned within biological tissue, for example to monitor biological signals within the volume of the sensor, provide stimulating signals to a brain, and so forth.