The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2014

Filed:

Jul. 24, 2012
Applicant:

Tatsuya Yamada, Osaka, JP;

Inventor:

Tatsuya Yamada, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/04 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A thin-film transistor according to the present disclosure includes: a substrate; a gate electrode above the substrate; a gate insulating layer on the gate electrode; a channel layer on the gate insulating layer which is located on the gate electrode; a source electrode above the channel layer; a drain electrode above the channel layer; and a barrier layer between the channel layer and the source electrode and between the channel layer and the drain electrode. Each of the source electrode and the drain electrode is made of a metal including copper, and the barrier layer contains nitrogen and molybdenum and has a density greater than 7.5 g/cmand less than 10.5 g/cm.


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