The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Mar. 31, 2011
Hideki Shimizu, Ohbu, JP;
Mutsumi Kitagawa, Inuyama, JP;
Hideki Shimizu, Ohbu, JP;
Mutsumi Kitagawa, Inuyama, JP;
NGK Insulators, Ltd., Nagoya, JP;
Abstract
A substrateis prepared. 'A piezoelectric material layerwhich has not been fired' and which will become a piezoelectric membrane is formed above a first principal surfaceof the substrate. A first maskis formed above the piezoelectric material layer. 'The piezoelectric material layerexisting within a portion where the first maskdoes not exist' is eliminated by injecting a blast media including at least one of abrasive grains or an organic solvent onto the first principal surfaceof the substrate. Thereafter, the first maskis eliminated, and the piezoelectric material layeris fired. The substrate has a hollow portion, however, it does not necessarily have the hollow portion.