The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2014
Filed:
Apr. 18, 2011
Sang Uk Son, Yongin-si, KR;
IN Sang Song, Osan-si, KR;
Young IL Kim, Suwon-si, KR;
Duck Hwan Kim, Goyang-si, KR;
Chul Soo Kim, Hwaseong-si, KR;
Jea Shik Shin, Hwaseong-si, KR;
Hyung Rak Kim, Seoul, KR;
Jae Chun Lee, Seoul, KR;
Sang Uk Son, Yongin-si, KR;
In Sang Song, Osan-si, KR;
Young Il Kim, Suwon-si, KR;
Duck Hwan Kim, Goyang-si, KR;
Chul Soo Kim, Hwaseong-si, KR;
Jea Shik Shin, Hwaseong-si, KR;
Hyung Rak Kim, Seoul, KR;
Jae Chun Lee, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A Bulk Acoustic Wave Resonator (BAWR), a method of manufacturing of the BAWR, and duplexer including the BAWR are provided. The BAWR may include a first substrate including a via hole formed in a predetermined area of a bottom surface of the first substrate. A first air cavity may be formed above the first substrate, and a first lamination resonating portion may be laminated above the first air cavity in sequence of a lower electrode, a piezoelectric layer, and an upper electrode. A second air cavity may be formed above the first substrate, and a second lamination resonating portion may be laminated above the second air cavity in sequence of the lower electrode, the piezoelectric layer, and the upper electrode. The first lamination resonating portion and the second lamination resonating portion may be connected via either the lower electrode or the upper electrode. A first electrode portion may include a third air cavity formed on a bottom surface of either the lower electrode or the upper electrode connecting between the first lamination resonating portion and the second lamination resonating portion.