The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2014
Filed:
Jul. 06, 2010
Hyun Jong You, Daejeon, KR;
Soo Ouk Jang, Daejeon, KR;
Yong Ho Jung, Seoul, KR;
Bong Ju Lee, Daejeon, KR;
Hyun Jong You, Daejeon, KR;
Soo Ouk Jang, Daejeon, KR;
Yong Ho Jung, Seoul, KR;
Bong Ju Lee, Daejeon, KR;
Korea Basic Science Institute, Daejeon-Si, KR;
Abstract
The present invention relates to the new structure antenna to create the uniform large area plasma using microwave. The microwave antenna to create the plasma of present invention comprises the waveguide, main body of antenna and the coaxial structure connecting part which connects said waveguide and said main body of antenna electrically, the main body of antenna comprises the conductive block in donut shape forming multiple slots, and notches are formed between the multiple slots of the conductive block and multiple permanent magnets are inserted into the notches. The multiple slots can be formed by passing through the inside and outside of the conductive block and the multiple slots can be formed with repetitive square wave pattern.