The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2014
Filed:
Dec. 21, 2011
Thomas Pfeifer, Zschopau, DE;
Rainer Wogritsch, Vienna, AT;
Thomas Pfeifer, Zschopau, DE;
Rainer Wogritsch, Vienna, AT;
Leica Mikrosysteme GmbH, Vienna, AT;
Abstract
The invention relates to a cooling apparatus () for a sample in an ion beam etching process, including, a sample stage () for arranging the sample, a coolant receptacle () containing a coolant, at least one thermal conduction element () that connects the sample stage () to the coolant, a cooling finger () connected to the thermal conduction element (), the cooling finger () comprising a conduit () through which coolant can flow and which is connectable to the coolant receptacle (). The invention further relates to a method of adjusting the temperature of a sample in an ion beam etching process, including mounting a sample on a coolable sample stage (), aligning the sample on the sample stage (), and cooling the sample by coolant directed through a conduit () of a cooling finger.