The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2014
Filed:
Jul. 19, 2005
James Robert Smith, Taunton, GB;
Andrew James Seeley, Bristol, GB;
James Robert Smith, Taunton, GB;
Andrew James Seeley, Bristol, GB;
Edwards Limited, Crawley, West Sussex, GB;
Abstract
System for treating an effluent fluid stream from a process tool including a vacuum pump () for drawing an effluent stream from the process tool chamber, an abatement device () for treating the effluent stream and a liquid ring pump () for at least partially evacuating the abatement device (). During use, the abatement device () converts one or more components of the effluent stream, for example F2 or a PFC, into one or more liquid-soluble a compounds, for example HF, that are less harmful to the environment. The liquid ring pump () receives the effluent stream and a liquid, and exhausts a solution of the liquid and the liquid-soluble component of the effluent stream. The liquid ring pump () thus operates as both a wet scrubber and an atmospheric vacuum pumping stage.