The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2014
Filed:
Feb. 01, 2008
Kimio Nakayama, Kurashiki, JP;
Nobuo Takaoka, Kurashiki, JP;
Mitsuru Kato, Kurashiki, JP;
Hirofumi Kikuchi, Kurashiki, JP;
Jiro Tanaka, Okayama, JP;
Kimio Nakayama, Kurashiki, JP;
Nobuo Takaoka, Kurashiki, JP;
Mitsuru Kato, Kurashiki, JP;
Hirofumi Kikuchi, Kurashiki, JP;
Jiro Tanaka, Okayama, JP;
Kuraray Co., Ltd., Kurashiki-shi, JP;
Abstract
It is an object of the present invention to provide a polishing pad that is resistant to scratching and also has excellent flattening performance. One aspect of the present invention is a polishing pad, comprising a fiber-entangled body formed from fiber bundles made up of ultrafine fibers in which the average cross sectional area is between 0.01 and 30 μm, and a macromolecular elastomer, wherein part of the macromolecular elastomer is present inside the fiber bundles, whereby the ultrafine fibers are bundled, the number of fiber bundles per unit of surface area present in a cross section in the thickness direction is at least 600 bundles per square millimeter, and the volumetric ratio of a portion excluding voids is between 55 and 95%.