The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2014

Filed:

Mar. 26, 2010
Applicants:

Shozo Aoki, Ome, JP;

Masahiro Nonoguchi, Tachikawa, JP;

Inventors:

Shozo Aoki, Ome, JP;

Masahiro Nonoguchi, Tachikawa, JP;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/18 (2006.01); G01N 23/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

An X-ray generating apparatus is disclosed which includes a tube body having a vacuum interior, an electron source provided within the tube body to generate an electron beam, a target, within the tube body that is irradiated with the electron beam to generate an X-ray, and an X-ray window for taking out the X-ray generated outside of the tube body. A plurality of grooves are formed on a surface of a member building up the target. The grooves each have a fine width and are inclined by a predetermined angle (α), from a direction perpendicular to an elongating direction of the grooves, so that they bridge over the plural numbers of grooves. The X-ray generating apparatus is configured such that a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between the grooves, emits at a predetermined extraction angle (β), passing through the X-ray window. An inspection apparatus which includes the X-ray generating apparatus is also disclosed.


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