The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Sep. 12, 2012
Lawrence Shah, Maitland, FL (US);
James M. Bovatsek, San Jose, CA (US);
Alan Y. Arai, Fremont, CA (US);
Tadashi Yamamoto, Fremont, CA (US);
Rajesh S. Patel, Fremont, CA (US);
Donald J. Harter, Ann Arbor, MI (US);
Lawrence Shah, Maitland, FL (US);
James M. Bovatsek, San Jose, CA (US);
Alan Y. Arai, Fremont, CA (US);
Tadashi Yamamoto, Fremont, CA (US);
Rajesh S. Patel, Fremont, CA (US);
Donald J. Harter, Ann Arbor, MI (US);
Imra America, Inc., Ann Arbor, MI (US);
Abstract
A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.