The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Aug. 31, 2012
Min-wei Hung, Hsinchu, TW;
Hsin-yi Tsai, Hsinchu, TW;
Kuo-cheng Huang, Hsinchu, TW;
Chun-yao Huang, New Taipei, TW;
Min-Wei Hung, Hsinchu, TW;
Hsin-Yi Tsai, Hsinchu, TW;
Kuo-Cheng Huang, Hsinchu, TW;
Chun-Yao Huang, New Taipei, TW;
National Applied Research Laboratories, Taipei, TW;
MFC Sealing Technology Co., Ltd., New Taipei, TW;
Abstract
An inspection system and method for inspecting the surface defects of the specimen is provided. The inspection system includes a laser focus module, a microscope objective module, an image pick-up module, and a process module. The laser focus module configured to emit laser beam on the specimen by a predetermined angle relative to a surface of the specimen, and to generate scattered light and reflected light when the laser beam irradiates on the surface defects of the specimen. The process module can calculate the real size of the defects by using the intensity information obtained from the image pick-up module and the microscope objective module or using the diameter information obtained from the reflected light image while the reflected light projects on a screen.