The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Mar. 08, 2012
Applicant:
Yusuke Kasahara, Kanagawa-ken, JP;
Inventor:
Yusuke Kasahara, Kanagawa-ken, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
According to one embodiment, a method for manufacturing a semiconductor device includes forming a film containing boron on a semiconductor substrate, forming a film containing silicon oxide on the film containing boron, patterning the film containing silicon oxide and etching the film containing boron with a gas containing chlorine by using the patterned film containing silicon oxide as a mask.