The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Mar. 25, 2010
Chang Soo Woo, Suwon-si, KR;
Hee Jae Kim, Seoul, KR;
Sung Jae Lee, Incheon-si, KR;
Sang Geun Yun, Gunpo-si, KR;
Tae Ho Kim, Seoul, KR;
Chang Soo Woo, Suwon-si, KR;
Hee Jae Kim, Seoul, KR;
Sung Jae Lee, Incheon-si, KR;
Sang Geun Yun, Gunpo-si, KR;
Tae Ho Kim, Seoul, KR;
Cheil Industries, Inc., Gumi-si, Kyeongsangbuk-do, KR;
Abstract
A composition with improved shelf life for filling small gaps in a semiconductor device is provided. The composition comprises an end-capped silicone polymer. The molecular weight of the end-capped silicone polymer is not varied during storage. In addition, the dissolution rate (DR) of the composition in an alkaline developing solution is maintained at a desired level during storage. That is, the composition is highly stable during storage. Therefore, the composition is suitable for use in a node separation process for the fabrication of a semiconductor capacitor.