The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Feb. 24, 2010
Christopher Fryer Thorgrimsson, Fremont, CA (US);
Christopher Fryer Thorgrimsson, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An arrangement for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool is provided. The arrangement includes means for receiving a first user-provided location indicator and a second user-provided location indicator on an on-screen graphical representation of the plasma cluster tool. The arrangement also includes means for ascertaining data pertaining to a set of paths between the first user-provided location indicator and the second user-provided location indicator. The arrangement further includes means for forming the set of wafer transfer instructions responsive to the data pertaining to the set of paths, the set of wafer transfer instructions being configured to transfer the wafer along a set of wafer-holding locations associated with one of the set of paths.