The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Mar. 27, 2012
Hiroko Nakamura, Yokohama, JP;
Satoshi Tanaka, Kawasaki, JP;
Satoshi Mikoshiba, Yamato, JP;
Atsushi Hieno, Kawasaki, JP;
Shigeki Hattori, Yokohama, JP;
Hiroko Nakamura, Yokohama, JP;
Satoshi Tanaka, Kawasaki, JP;
Satoshi Mikoshiba, Yamato, JP;
Atsushi Hieno, Kawasaki, JP;
Shigeki Hattori, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to one embodiment, there is provided a method of forming a pattern, includes forming a guide pattern including a first region having a first surface energy and a second region having a second surface energy on a to-be-processed film, the first and second regions alternately arranged in one direction, forming a block copolymer layer on the guide pattern, and causing microphase separation in the block copolymer layer, the microphase-separated structure is a lamellar block copolymer pattern.