The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Apr. 20, 2012
Moosung Chae, Poughkeepsie, NY (US);
Bum Ki Moon, LaGrangeville, NY (US);
Sunoo Kim, Hopewell Junction, NY (US);
Danny Pak-chum Shum, Poughkeepsie, NY (US);
Moosung Chae, Poughkeepsie, NY (US);
Bum Ki Moon, LaGrangeville, NY (US);
Sunoo Kim, Hopewell Junction, NY (US);
Danny Pak-Chum Shum, Poughkeepsie, NY (US);
Infineon Technologies AG, Neubiberg, DE;
Abstract
An electro chemical deposition system is described for forming a feature on a semiconductor wafer. The electro chemical deposition is performed by powering electrodes that includes a cathode, an anode and a plurality of electrically independent auxiliary electrodes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile