The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Dec. 07, 2005
Hongmei Zhang, San Jose, CA (US);
Richard E. Demaray, Portola Valley, CA (US);
Hongmei Zhang, San Jose, CA (US);
Richard E. Demaray, Portola Valley, CA (US);
Other;
Abstract
In accordance with the present invention, deposition of LiCoOlayers in a pulsed-dc physical vapor deposition process is presented. Such a deposition can provide a low-temperature, high deposition rate deposition of a crystalline layer of LiCoOwith a desired <101> or <003> orientation. Some embodiments of the deposition address the need for high rate deposition of LiCoOfilms, which can be utilized as the cathode layer in a solid state rechargeable Li battery. Embodiments of the process according to the present invention can eliminate the high temperature (>700° C.) anneal step that is conventionally needed to crystallize the LiCoOlayer.