The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2014
Filed:
Sep. 21, 2007
Applicants:
Shahyaan Desai, Ithaca, NY (US);
Anil N. Netravali, Ithaca, NY (US);
Michael O. Thompson, Ithaca, NY (US);
Inventors:
Shahyaan Desai, Ithaca, NY (US);
Anil N. Netravali, Ithaca, NY (US);
Michael O. Thompson, Ithaca, NY (US);
Assignee:
Cornell Research Foundation, Inc., Ithaca, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H03H 9/50 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microelectromechanical structure (MEMS) device includes a secondary MEMS element displaceably coupled to a substrate. A primary MEMS element is displaceably coupled to the secondary MEMS element and has a resonant frequency substantially equal to the secondary MEMS element and has a much larger displacement than the secondary MEMS element.