The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2014
Filed:
Nov. 17, 2012
Applicants:
The Board of Regents of the University of Texas System, Austin, TX (US);
Texas Micropower, Inc., Dallas, TX (US);
Inventors:
Erika Fuentes-Fernandez, Richardson, TX (US);
Pradeep Shah, Dallas, TX (US);
Wardia Mechtaly-Debray, Hsinchu County, TW;
Bruce E. Gnade, Lewisville, TX (US);
Assignees:
The Board of Regents of the University of Texas System, Austin, TX (US);
Texas Micropower, Inc., Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); H01L 41/083 (2006.01);
U.S. Cl.
CPC ...
Abstract
The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process.