The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2014
Filed:
Apr. 29, 2011
Xing Lin, San Jose, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Xiaoping Zhou, San Jose, CA (US);
Valentin Todorow, Palo Alto, CA (US);
Andrew Nguyen, San Jose, CA (US);
Anchel Sheyner, San Francisco, CA (US);
Xing Lin, San Jose, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Xiaoping Zhou, San Jose, CA (US);
Valentin Todorow, Palo Alto, CA (US);
Andrew Nguyen, San Jose, CA (US);
Anchel Sheyner, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods and apparatus for controlling the temperature of a substrate during processing are provided herein. In some embodiments, an apparatus for retaining and controlling substrate temperature may include a puck of dielectric material; an electrode disposed in the puck proximate a surface of the puck upon which a substrate is to be retained; and a plurality of heater elements disposed in the puck and arranged in concentric rings to provide independent temperature control zones.