The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2014
Filed:
Sep. 06, 2011
Seiichi Chiba, Minowa, JP;
Shuji Kojima, Minamiminowa, JP;
Toshiyuki Enta, Yuza, JP;
Akinori Shindo, Hokuto, JP;
Terunao Hanaoka, Suwa, JP;
Yasuo Yamasaki, Shiojiri, JP;
Seiichi Chiba, Minowa, JP;
Shuji Kojima, Minamiminowa, JP;
Toshiyuki Enta, Yuza, JP;
Akinori Shindo, Hokuto, JP;
Terunao Hanaoka, Suwa, JP;
Yasuo Yamasaki, Shiojiri, JP;
Seiko Epson Corporation, , JP;
Abstract
A sensor device includes a first electrode disposed on active surface side of a silicon substrate, an external connecting terminal electrically connected to the first electrode, at least one stress relaxation layer disposed between the silicon substrate and the external connecting terminal, a connecting terminal disposed on the active surface side of the silicon substrate, and a vibration gyro element having weight sections as mass adjustment sections, the vibration gyro element is held by the silicon substrate due to connection between the connection electrode and the external connecting terminal, and a meltage protection layer formed in an area where the stress relaxation layer and the mass adjustment section overlap each other in a plan view is provided.